Fu, Chencong https://orcid.org/0000-0002-0563-9757
Dong, Yicheng
Li, Yifei
Wang, Weizong https://orcid.org/0000-0001-9950-6519
Wang, Zihan https://orcid.org/0009-0004-7777-2807
Liu, Wei
Funding for this research was provided by:
National Natural Science Foundation of China (51977003)
Article Title: Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-08-26
Date Accepted: 2023-12-19
Online publication date: 2024-01-04