Choi, Jeong Eun https://orcid.org/0000-0002-5233-7364
An, Surin https://orcid.org/0000-0001-7582-6147
Lee, Younji
Lee, Yongil
Kim, Dohyun
Hong, Sang Jeen https://orcid.org/0000-0002-6576-690X
Funding for this research was provided by:
Korea Semiconductor Research Consortium (20022492)
Korea Evaluation Institute of Industrial Technology (1415182073)
Article Title: Explainable artificial intelligence-based evidential inferencing on process faults in plasma etching
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2023-07-18
Date Accepted: 2024-01-26
Online publication date: 2024-02-07