Denysenko, I B https://orcid.org/0000-0001-7343-086X
Kersten, H https://orcid.org/0000-0003-1798-7588
Funding for this research was provided by:
The Alexander von Humboldt Foundation (A Digital Cooperation Fellowship)
Article Title: Properties of the ionization region in a magnetron plasma at gas-aggregation-source-relevant pressure regime explored using a global model
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2024-04-05
Date Accepted: 2024-05-13
Online publication date: 2024-05-23