Chen, Ao
Liang, Zhihao
Liao, Zhiying
Zhang, Huiqi
Li, Songju https://orcid.org/0009-0002-0342-7299
Wang, Ruihua
Li, Yan
Yu, Mengxia
Liu, Xianzhe https://orcid.org/0009-0000-8874-3666
Ning, Honglong https://orcid.org/0000-0001-9518-5738
Huang, Aiping https://orcid.org/0009-0008-1902-1318
Luo, Jianyi
Funding for this research was provided by:
Guangdong Province (2021ZDJS094)
Natural Science Foundation of Guangdong Province (2021A1515011935)
Guangdong Basis and Applied Fundamental Research Fund (2022A1515110621)
Climbing Program (pdjh202360536)
Wuyi University (2022CX33)
Article Title: Efficient gradient heating-up approach for rapid growth of high-quality amorphous ZrO2 dielectric films
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2024-02-23
Date Accepted: 2024-05-24
Online publication date: 2024-06-04