Li, Xinran https://orcid.org/0009-0002-4958-1523
Su, Xujun
Wang, Guobin
Chen, Jingjing https://orcid.org/0000-0002-5189-3916
Wang, Luhua
Song, Wentao
Xu, Ke
Funding for this research was provided by:
Fundamental Research Pilot Project of Suzhou (SJC2021007)
National Natural Science Foundation of China (No. 62104247)
the National Key R&D Program of China (No.2022YFB3605204)
the 2020 Key R&D Program-Industry Foresight and Key Core Technologies of Jiangsu Province (No. BE2020004)
Chinese Academy of Sciences Pioneer Hundred Talents Program (W. Song)
Article Title: Comparative analysis of microstructure, electrical and optical performance in sidewall etching process for GaN-based green micro-LED
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2024-01-31
Date Accepted: 2024-06-10
Online publication date: 2024-06-26