Zhang, Yi-Fan https://orcid.org/0000-0001-7540-0891
Dong, Wan https://orcid.org/0000-0002-0724-1697
Jia, Wen-Zhu
Song, Yuan-Hong https://orcid.org/0000-0001-5712-9241
Funding for this research was provided by:
National Natural Science Foundation of China under Grant (11975067)
Liaoning Provincial Natural Science Foundation Joint Fund under Grant (2023-BSBA-089)
Article Title: Hybrid simulation of a capacitive Ar/SiH4 discharge driven by electrically asymmetric voltage waveforms
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2024-05-05
Date Accepted: 2024-07-12
Online publication date: 2024-07-24