Doyle, Scott J https://orcid.org/0000-0002-8741-1018
Larson, Amanda https://orcid.org/0000-0002-0319-7326
Rosenzweig, Guy https://orcid.org/0000-0002-6365-666X
Gunn, James
Kushner, Mark J https://orcid.org/0000-0001-7437-8573
Funding for this research was provided by:
MKS Instruments
National Science Foundation (CBET-2032604)
U.S. Department of Energy Office of Fusion Energy Sciences (DE-SC0020232)
Article Title: Transformer coupled toroidal wave-heated remote plasma sources operating in Ar/NF3 mixtures
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-04-23
Date Accepted: 2024-07-22
Online publication date: 2024-08-02