Li, Shanjie https://orcid.org/0000-0002-0084-3898
Wu, Changtong
Zeng, Fanyi
Wu, Nengtao
Luo, Ling
Cao, Ben
Wang, Wenliang https://orcid.org/0000-0002-1336-4503
Li, Guoqiang https://orcid.org/0000-0002-1493-6657
Funding for this research was provided by:
National Natural Science Foundation of China (52172141)
National Key Research and Development Project (2022YFB3604500)
Key Area Research and the Technology Development Project of Shanxi-Zheda (2022SX-TD017)
Key Area R&D Program of Guangzhou (202103030002)
Article Title: Fabrication and formation mechanisms of ohmic conducts with low annealing temperature for GaN/AlN superlattice barrier HEMTs
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2024-05-20
Date Accepted: 2024-09-26
Online publication date: 2024-10-16