Bouvier, Tomás Fernández https://orcid.org/0009-0004-9259-237X
Jantunen, Ville https://orcid.org/0000-0003-1732-6528
Vihuri, Saana https://orcid.org/0009-0003-6969-8443
Cazalilla, Alvaro López https://orcid.org/0000-0002-9365-4294
Djurabekova, Flyura https://orcid.org/0000-0002-5828-200X
Funding for this research was provided by:
Research Council of Finland (349690)
Article Title: Atomistic insights on P implantation by using molecular ion beams for scalable spin-qubit arrays
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-08-15
Date Accepted: 2024-12-29
Online publication date: 2025-01-08