Winzer, T https://orcid.org/0000-0002-3834-9123
Reiser, C
Benedikt, J https://orcid.org/0000-0002-8954-1908
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (BE4749/7-1)
Article Title: Particle-free thin film deposition from acetylene and silane precursors using atmospheric plasma vacuum ultraviolet radiation
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2025-05-02
Date Accepted: 2025-06-17
Online publication date: 2025-06-30