Bai, Kun
Yang, Jun https://orcid.org/0000-0002-0596-1279
Ding, Xingwei https://orcid.org/0000-0002-9002-5185
Zhang, Jianhua https://orcid.org/0000-0001-8061-1861
Funding for this research was provided by:
National Key Research and Development Program of China (2024YFA1209100)
National Natural Science Foundation of China (62274105)
Article Title: High-performance two-dimensional electron gas IGZO thin-film transistors realized by RF sputtering and atomic layer deposition
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
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Publication dates
Date Received: 2025-06-22
Date Accepted: 2025-08-13
Online publication date: 2025-08-26