Zhang, Xuanchang https://orcid.org/0009-0007-0382-2981
Zeng, Haotian https://orcid.org/0000-0002-7328-9576
Jia, Hui https://orcid.org/0000-0002-8325-3948
Yu, Xueying
Huo, Suguo
Mtunzi, Makhayeni https://orcid.org/0009-0000-3924-2726
Deng, Huiwen
Park, Jaeseong https://orcid.org/0000-0002-6486-2342
Wang, Hexing
Seeds, Alwyn
Liu, Huiyun https://orcid.org/0000-0002-7654-8553
Tang, Mingchu https://orcid.org/0000-0001-6626-3389
Funding for this research was provided by:
HORIZON EUROPE European Innovation Council (101129904)
Engineering and Physical Sciences Research Council (EP/P006973/1)
Article Title: Optimisation of argon plasma pre-treatment for enhanced silicon surface preparation for germanium epitaxy
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-05-14
Date Accepted: 2025-10-06
Online publication date: 2025-10-17