Akhtar, Noman https://orcid.org/0009-0006-2098-2920
Ma, Liang https://orcid.org/0000-0001-5042-1354
Song, Xiaodong https://orcid.org/0009-0004-1175-7612
Liu, Ruizhe https://orcid.org/0009-0008-9097-5915
Mead, James L https://orcid.org/0000-0001-6536-9974
Hou, Lizhen https://orcid.org/0009-0004-8502-2459
Wang, Shiliang https://orcid.org/0000-0001-9709-6587
Funding for this research was provided by:
Changsha Municipal Natural Science Foundation (kq2402196)
National Natural Science Foundation of China (12072111 and 11674399)
Natural Science Foundation of Hunan Province (2025JJ50003)
Article Title: Quantifying O 2 /Ar plasma-modified surface energy of Si/SiO 2 /Si 3 N 4 via ZnS-nanobelt adhesion mechanics
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-03-17
Date Accepted: 2025-10-13
Online publication date: 2025-10-23