Yin, Guiqin https://orcid.org/0000-0002-8160-7861
Tuo, Sheng https://orcid.org/0009-0009-5077-1835
Yuan, Qianghua https://orcid.org/0000-0001-9800-4349
Sun, Zilong
Gao, Zhanhui
Ma, Lulu
Funding for this research was provided by:
Project of National Natural Science Foundation of China (12165019)
Article Title: The discharge characteristics of magnetized capacitively coupled Ar/CH 4 plasma with different pressure
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2026 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2026-01-07
Date Accepted: 2026-03-23
Online publication date: 2026-03-30