Chen, Xiuguo https://orcid.org/0000-0002-7067-5084
Gu, Honggang
Jiang, Hao
Zhang, Chuanwei
Liu, Shiyuan https://orcid.org/0000-0002-0756-1439
Funding for this research was provided by:
National Science and Technology Major Project of China (2017ZX02101006-004)
National Natural Science Foundation of China (51475191, 51525502, 51727809, 51775217)
Journal title: Measurement Science and Technology
Article type: paper
Article title: Probing optimal measurement configuration for optical scatterometry by the multi-objective genetic algorithm
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-11-07
Date accepted: 2018-01-18
Online publication date: 2018-03-14