Jones, Christopher W https://orcid.org/0000-0002-6301-4536
O’Connor, Daniel https://orcid.org/0000-0002-3999-3797
Funding for this research was provided by:
EURAMET (EMPIR Grant Agreement 14IND09 MetHP)
Journal title: Measurement Science and Technology
Article type: paper
Article title: A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
Copyright information: © 2018 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2017-12-22
Date accepted: 2018-03-29
Online publication date: 2018-05-22