Keksel, A https://orcid.org/0000-0001-7779-4687
Eifler, M https://orcid.org/0000-0001-6628-7284
Seewig, J
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (SFB 926)
Journal title: Measurement Science and Technology
Article type: paper
Article title: Modeling of topography measuring instrument transfer functions by time series models
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-04-05
Date accepted: 2018-07-19
Online publication date: 2018-08-09