Attota, Ravi Kiran https://orcid.org/0000-0002-0729-2435
Kang, Hyeonggon
Scott, Keana
Allen, Richard
Vladar, Andras E
Bunday, Benjamin
Journal title: Measurement Science and Technology
Article type: paper
Article title: Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy
Copyright information: © 2018 IOP Publishing Ltd
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Publication dates
Date received: 2018-06-15
Date accepted: 2018-09-27
Online publication date: 2018-11-06