Kizu, Ryosuke https://orcid.org/0000-0002-9638-0006
Misumi, Ichiko https://orcid.org/0000-0001-5431-7298
Hirai, Akiko https://orcid.org/0000-0003-0198-8922
Kinoshita, Kazuto
Gonda, Satoshi https://orcid.org/0000-0003-4535-1878
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization (Project code P09002)
Japan Society for the Promotion of Science (KAKENHI Grant Number JP16K18119)
Journal title: Measurement Science and Technology
Article type: paper
Article title: Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-09-05
Date accepted: 2018-11-12
Online publication date: 2018-12-11