Qiao, Xiaoyue https://orcid.org/0000-0002-8125-6061
Chen, Xin
Ekberg, Peter https://orcid.org/0000-0002-9512-588X
Ding, Guoqing
Cai, Xiaoyu
Wei, Jiasi
Wu, Junjie
Funding for this research was provided by:
Scientific Research Programs of Shanghai Municipal Bureau of Quality and Technical Supervision (2018-06)
Major projects of Science and Technology Commission of Shanghai Municipality (17JC1400804)
Article Title: Self-calibration for the 2D stage based on weighted least squares
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-04-18
Date Accepted: 2019-08-20
Online publication date: 2019-09-30