Uruma, Takeshi https://orcid.org/0000-0001-6725-9250
Satoh, Nobuo https://orcid.org/0000-0001-7052-7164
Yamamoto, Hidekazu
Iwata, Futoshi https://orcid.org/0000-0002-2048-7579
Funding for this research was provided by:
Japan Society for the Promotion of Science (18J10822)
Article Title: Development of scanning capacitance force microscopy using the dissipative force modulation method
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-07-09
Date Accepted: 2019-11-01
Online publication date: 2019-12-27