Misumi, Ichiko https://orcid.org/0000-0001-5431-7298
Kizu, Ryosuke https://orcid.org/0000-0002-9638-0006
Sugawara, Kentaro https://orcid.org/0000-0002-3429-5551
Hirai, Akiko https://orcid.org/0000-0003-0198-8922
Gonda, Satoshi https://orcid.org/0000-0003-4535-1878
Funding for this research was provided by:
The Precise Measurement Technology Promotion Foundation
Nippon Sheet Glass Foundation for Materials Science and Engineering
Journal title: Measurement Science and Technology
Article type: paper
Article title: A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-11-21
Date accepted: 2020-04-29
Online publication date: 2020-06-23