Xiong, Xin
Quan, Lue
Shimizu, Yuki https://orcid.org/0000-0003-3527-2869
Matsukuma, Hiraku https://orcid.org/0000-0001-8125-9708
Gao, Wei
Funding for this research was provided by:
Japan Society for the Promotion of Science
Article Title: Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-11-26
Date Accepted: 2021-02-25
Online publication date: 2021-04-14