Dou, Xiujie https://orcid.org/0000-0002-8135-7890
Pereira, Silvania F
Min, Changjun
Zhang, Yuquan https://orcid.org/0000-0001-7659-9003
Meng, Peiwen https://orcid.org/0000-0003-2888-5675
Urbach, H Paul
Yuan, Xiaocong
Funding for this research was provided by:
National Natural Science Foundation of China (61935013)
Natural Science Foundation of Guangdong Province (2016A030312010)
Science and Technology Innovation Commission of Shenzhen (KQTD2017033011044403)
Leading Talents of Guangdong Province Program (00201505)
Article Title: Determination of steep sidewall angle using polarization-sensitive asymmetric scattering
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-12-23
Date Accepted: 2021-04-26
Online publication date: 2021-05-17