Pahl, Tobias https://orcid.org/0000-0002-8610-8818
Hagemeier, Sebastian
Bischoff, Jörg
Manske, Eberhard https://orcid.org/0000-0002-1672-2978
Lehmann, Peter https://orcid.org/0000-0003-0051-5066
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (LE 992/14-1)
Article Title: Rigorous 3D modeling of confocal microscopy on 2D surface topographies
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-01-08
Date Accepted: 2021-04-30
Online publication date: 2021-06-07