Funding for this research was provided by:
National Natural Science Foundation of China (51775352)
Shenzhen Fundamental Research Program (JCYJ20180305124633795)
Article Title: Compact chromatic confocal sensor for displacement and thickness measurements
Journal Title: Measurement Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-10-26
Date Accepted: 2023-01-17
Online publication date: 2023-02-06