Yu, Mingzhi https://orcid.org/0000-0003-4706-0863
Jia, Chen https://orcid.org/0000-0001-9649-8154
Han, Xiangguang
Xia, Yong
Zhao, Libo https://orcid.org/0000-0001-6101-8173
Yang, Ping
Lu, Dejiang
Wang, Yonglu
Wang, Xiaozhang
Jiang, Zhuangde
Funding for this research was provided by:
National Key Research & Development (R&D) Plan (2021YFB3203200)
National Natural Science Foundation of China (51890884)
Chongqing Natural Science Basic Research Project (cstc2021jcyj-msxmX0801)
Article Title: Ultra-high-sensitivity micro-accelerometer achieved by pure axial deformation of piezoresistive beams
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2023 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-04-27
Date Accepted: 2023-08-23
Online publication date: 2023-09-26