Xie, Zhangning https://orcid.org/0000-0002-5318-4363
Jin, Tao
Lei, Lihua
Lin, Zichao
Yao, Yulin
Xue, Dongbai
Dun, Xiong
Deng, Xiao https://orcid.org/0000-0002-5956-6880
Cheng, Xinbin https://orcid.org/0000-0002-3855-483X
Funding for this research was provided by:
Program of Shanghai Academic Research Leader (21XD1425000)
Special Development Funds for Major Projects of Shanghai Zhangjiang National Independent Innovation Demonstration Zone (ZJ2021-ZD-008)
Opening Fund of Shanghai Key Laboratory of Online Detection and Control Technology (ZX2020101)
National Key Research and Development Program of China (2022YFF0605502)
National Natural Science Foundation of China (62075165)
National Natural Science Foundation of China (61925504)
Article Title: Study of interferometric signal correction methods in ultra-precision displacement measurement
Journal Title: Measurement Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-07-08
Date Accepted: 2023-12-20
Online publication date: 2023-12-28