Ribotta, Luigi https://orcid.org/0000-0001-5334-5246
Delvallée, Alexandra https://orcid.org/0000-0002-8908-0742
Cara, Eleonora https://orcid.org/0000-0002-5981-9569
Bellotti, Roberto
Giura, Andrea https://orcid.org/0009-0000-2761-641X
Carlo, Ivan De https://orcid.org/0000-0002-4066-8107
Fretto, Matteo
Knulst, Walter
Koops, Richard
Torre, Bruno
Saghi, Zineb
Boarino, Luca https://orcid.org/0000-0002-1221-2591
Funding for this research was provided by:
H2020 Excellent Science (Grant agreement ID: 101007417)
European Metrology Programme for Innovation and Research (19ENG05 High throughput metrology for nanowire ene)
Article Title: AFM interlaboratory comparison for nanodimensional metrology on silicon nanowires
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-03-27
Date Accepted: 2024-07-03
Online publication date: 2024-07-12