Funding for this research was provided by:
Research and Development Program of China (2022YFB3207700)
Article Title: Parametric model of resonant differential MEMS pressure sensors: enabling rapid structural optimization and automated layout design
Journal Title: Measurement Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-08-10
Date Accepted: 2024-11-21
Online publication date: 2024-12-06