Kizu, Ryosuke https://orcid.org/0000-0002-9638-0006
Kobayashi, Keita https://orcid.org/0000-0002-4642-1690
Funding for this research was provided by:
Japan Society for the Promotion of Science (KAKENHI Grand Number JP20K04511)
Iketani Science and Technology Foundation (Grand Number 0351075-A)
Article Title: Comparing bottom–up and top–down SI traceability approaches in dimensional nanometrology: reference material measurements using transmission electron microscopy and atomic force microscopy
Journal Title: Measurement Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-12-06
Date Accepted: 2025-04-09
Online publication date: 2025-04-23