Article Title: Physics-informed unsupervised neural network for parametric analysis and reconstruction via scatterometry evaluation (PUNN-PARSE) of grating structures on extreme ultra-violet collector mirror
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-05-20
Date Accepted: 2025-08-05
Online publication date: 2025-08-26