Facchin, Alessandro https://orcid.org/0000-0002-4661-0520
Cautero, Marco https://orcid.org/0000-0003-4976-2033
Gregorat, Leonardo
Panighel, Mirco https://orcid.org/0000-0001-8413-5196
Kaiser, Sebastian https://orcid.org/0000-0001-8474-6261
Reich, Johanna https://orcid.org/0000-0001-5065-5871
Giuressi, Dario https://orcid.org/0000-0003-3169-7261
Lechner, Barbara A J https://orcid.org/0000-0001-9974-1738
Cautero, Giuseppe https://orcid.org/0000-0002-6873-2051
Esch, Friedrich https://orcid.org/0000-0001-7793-3341
Funding for this research was provided by:
H2020 European Research Council (850764)
Alexander von Humboldt foundation
Deutsche Forschungsgemeinschaft (ES 349/4-1)
European Union (101007417)
Article Title: Deployment of an integrated fast scanning probe microscopy module—control software and performance
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-08-13
Date Accepted: 2025-09-29
Online publication date: 2025-10-10