He, Chunling https://orcid.org/0009-0000-5170-7485
Lin, Zichao
Xiao, Guangxu
Wang, Jun
Li, Yao
Yang, Yaao
Xue, Dongbai https://orcid.org/0009-0008-8384-6066
Dun, Xiong https://orcid.org/0009-0003-8154-6397
Deng, Xiao https://orcid.org/0000-0002-5956-6880
Cheng, Xinbin https://orcid.org/0000-0002-3855-483X
Wang, Zhanshan https://orcid.org/0000-0002-2161-6934
Li, Tongbao
Funding for this research was provided by:
National Key Research and Development Program of China (2022YFF0605502)
the Aeronautical ScienceFoundation of China (ASFC-20230056038001)
Fundamental Research Funds for the Central Universities (22120250512)
National Natural Science Foundation of China (62475195)
the Program of Shanghai Academic Research Leader (623QA1409400,24ZR1471300)
Article Title: Dynamic traceability verification of chromium atomic lithography grating pitch using dual-interferometer phase comparison
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-07-12
Date Accepted: 2025-10-22
Online publication date: 2025-11-18