Kim, Hyeong-U
Son, Juhyun
Kulkarni, Atul
Ahn, Chisung
Kim, Ki Seok
Shin, Dongjoo
Yeom, Geun Yong
Kim, Taesung
Journal title: Nanotechnology
Article type: paper
Article title: Highly uniform wafer-scale synthesis ofα-MoO3by plasma enhanced chemical vapor deposition
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-12-04
Date accepted: 2017-03-15
Online publication date: 2017-04-03