Liu, Lei
Huang, Yazhou
Sha, Jingjie
Chen, Yunfei
Funding for this research was provided by:
National Natural Science Foundation of China (U1332134)
International Foundation for Science (F/4736-2)
Journal title: Nanotechnology
Article type: paper
Article title: Layer-controlled precise fabrication of ultrathin MoS2 films by atomic layer deposition
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-07
Date accepted: 2017-03-21
Online publication date: 2017-04-19