Dagesyan, S A https://orcid.org/0000-0001-9230-9985
Shorokhov, V V https://orcid.org/0000-0003-0079-5328
Presnov, D E https://orcid.org/0000-0002-9213-0165
Soldatov, E S
Trifonov, A S https://orcid.org/0000-0002-9737-9621
Krupenin, V A https://orcid.org/0000-0003-0606-9060
Funding for this research was provided by:
Russian Science Foundation (16-12-00072)
Journal title: Nanotechnology
Article type: paper
Article title: Sequential reduction of the silicon single-electron transistor structure to atomic scale
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-14
Date accepted: 2017-04-18
Online publication date: 2017-05-11