Lee, Young Hwan
Kim, Han Joon
Moon, Taehwan
Kim, Keum Do
Hyun, Seung Dam
Park, Hyeon Woo
Lee, Yong Bin
Park, Min Hyuk
Hwang, Cheol Seong
Funding for this research was provided by:
National Research Foundation of Korea (2012K1A1A2040157)
National Research Foundation of Korea (2014R1A2A1A10052979)
Journal title: Nanotechnology
Article type: paper
Article title: Preparation and characterization of ferroelectric Hf0.5Zr0.5O2thin films grown by reactive sputtering
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-04-06
Date accepted: 2017-05-31
Online publication date: 2017-07-04