Qu, Juntian https://orcid.org/0000-0002-1799-5847
Lee, Martin
Hilke, Michael
Liu, Xinyu https://orcid.org/0000-0001-5705-9765
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada (EQPEQ 472835-15, RGPIN 418553-12)
Canada Foundation for Innovation (30316)
Canada Research Chairs (237293)
Journal title: Nanotechnology
Article type: paper
Article title: Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance ofin situnanoprobing
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-04-17
Date accepted: 2017-06-15
Online publication date: 2017-07-24