Junige, Marcel https://orcid.org/0000-0002-6633-2759
Löffler, Markus
Geidel, Marion
Albert, Matthias
Bartha, Johann W
Zschech, Ehrenfried
Rellinghaus, Bernd
Dorp, Willem F van
Journal title: Nanotechnology
Article type: paper
Article title: Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2substratum
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-04-11
Date accepted: 2017-08-24
Online publication date: 2017-09-06