Škereň, Tomáš https://orcid.org/0000-0003-0405-8210
Pascher, Nikola
Garnier, Arnaud
Reynaud, Patrick
Rolland, Emmanuel
Thuaire, Aurélie
Widmer, Daniel
Jehl, Xavier
Fuhrer, Andreas https://orcid.org/0000-0003-3537-5737
Funding for this research was provided by:
NCCR (QSIT)
EU-FET (PAMS 610446, SiAM 610637)
Journal title: Nanotechnology
Article type: paper
Article title: CMOS platform for atomic-scale device fabrication
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-04-24
Date accepted: 2018-08-02
Online publication date: 2018-08-24