Vahl, A https://orcid.org/0000-0002-7311-272X
Dittmann, J
Jetter, J
Veziroglu, S https://orcid.org/0000-0002-1310-6651
Shree, S
Ababii, N
Lupan, O https://orcid.org/0000-0002-7913-9712
Aktas, O C
Strunskus, T https://orcid.org/0000-0003-3931-5635
Quandt, E
Adelung, R
Sharma, S K
Faupel, F
Funding for this research was provided by:
Alexander von Humboldt-Stiftung (3-3MOL/1148833 STP)
Government of the Republic of Moldova (Institutional inst-15.817.02.29A)
Deutsche Forschungsgemeinschaft (FOR 2093 A2)
Article Title: The impact of O 2 /Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-11-20
Date Accepted: 2019-02-19
Online publication date: 2019-03-25