Chang, Bingdong https://orcid.org/0000-0003-2568-6646
Funding for this research was provided by:
Villum Fonden (00027987)
Journal title: Nanotechnology
Article type: paper
Article title: Oblique angled plasma etching for 3D silicon structures with wiggling geometries
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-08-20
Date accepted: 2019-11-04
Online publication date: 2019-11-26