Chang, Bingdong https://orcid.org/0000-0003-2568-6646
Funding for this research was provided by:
Villum Fonden (00027987)
Article Title: Oblique angled plasma etching for 3D silicon structures with wiggling geometries
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-08-20
Date Accepted: 2019-11-04
Online publication date: 2019-11-26