Zhao, Lan-Tian
Liu, Mingshan
Ren, Qing-Hua
Liu, Chen-He
Liu, Qiang
Chen, Ling-Li
Spiegel, Yohann
Torregrosa, Frank
Yu, Wenjie
Zhao, Qing-Tai http://orcid.org/0000-0002-2794-2757
Article Title: Phase evolution of ultra-thin Ni silicide films on CF4 plasma immersion ion implanted Si
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2019-09-06
Date Accepted: 2020-01-17
Online publication date: 2020-02-28