Gómez, Víctor J https://orcid.org/0000-0003-2364-8814
Graczyk, Mariusz
Jam, Reza Jafari https://orcid.org/0000-0001-9131-0271
Lehmann, Sebastian
Maximov, Ivan
Funding for this research was provided by:
Stiftelsen för Strategisk Forskning (RIF140090)
Article Title: Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2019-11-29
Date Accepted: 2020-04-07
Online publication date: 2020-05-05