He, Tao
Zhang, Jinlong
Jiao, Hongfei
Wang, Zhanshan https://orcid.org/0000-0002-2161-6934
Cheng, Xinbin https://orcid.org/0000-0002-3855-483X
Funding for this research was provided by:
Major projects of Science and Technology Commission of Shanghai (No. 17JC1400800)
the National Natural Science Foundation of China (Nos. 61522506)
the “Shu Guang” project supported by Shanghai Municipal Education Commission and Shanghai Education (No. 17SG22)
the National Program on Key Research Project (No. 2016YFA0200900)
Joint Sino-German Research Project (No. GZ1275)
the Fundamental Research Funds for the Central Universities, China
Journal title: Nanotechnology
Article type: paper
Article title: Near-infrared broadband Si:H/SiO2 multilayer gratings with high tolerance to fabrication errors
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-12-18
Date accepted: 2020-04-07
Online publication date: 2020-05-12