Zhang, Lei
Thomas, Joseph P
Guan, Xiaoyi
Heinig, Nina F
Leung, Kam Tong https://orcid.org/0000-0002-1879-2806
Article Title: High-energy ion (He+, Si++, Ga+, Au++) interactions with PMMA in ion beam lithography
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2020-02-07
Date Accepted: 2020-04-27
Online publication date: 2020-05-28