Hur, Jae https://orcid.org/0000-0003-1446-2305
Tasneem, Nujhat
Choe, Gihun
Wang, Panni https://orcid.org/0000-0001-8559-2727
Wang, Zheng
Khan, Asif Islam https://orcid.org/0000-0003-4369-106X
Yu, Shimeng https://orcid.org/0000-0002-0068-3652
Article Title: Direct comparison of ferroelectric properties in Hf 0.5 Zr 0.5 O 2 between thermal and plasma-enhanced atomic layer deposition
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-04-27
Date Accepted: 2020-07-14
Online publication date: 2020-10-05