Hönicke, Philipp https://orcid.org/0000-0002-0712-903X
Andrle, Anna
Kayser, Yves https://orcid.org/0000-0002-0301-2918
Nikolaev, Konstantin V https://orcid.org/0000-0002-4752-9599
Probst, Jürgen
Scholze, Frank https://orcid.org/0000-0001-8414-2169
Soltwisch, Victor https://orcid.org/0000-0001-8469-8589
Weimann, Thomas
Beckhoff, Burkhard
Funding for this research was provided by:
Electronic Components and Systems for European Leadership (826589 — MADEin4)
European Association of National Metrology Institutes (17SIP07)
Article Title: Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures
Journal Title: Nanotechnology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-06-25
Date Accepted: 2020-09-04
Online publication date: 2020-10-05