Lee, Kookjin https://orcid.org/0000-0002-9896-1090
Kim, Yeonsu
Lee, Hyebin
Park, Sojeong https://orcid.org/0000-0002-5431-7690
Lee, Yongwoo https://orcid.org/0000-0003-3224-1960
Joo, Min-Kyu https://orcid.org/0000-0001-7537-1015
Ji, Hyunjin https://orcid.org/0000-0002-3967-6900
Lee, Jaewoo
Chun, Jungu
Sung, Moonsoo
Cho, Young-Hoon
Kim, Doyoon
Choi, Junhee
Lee, Jae Woo https://orcid.org/0000-0002-4876-3109
Jeon, Dae-Young https://orcid.org/0000-0002-3781-8514
Choi, Sung-Jin https://orcid.org/0000-0003-1301-2847
Kim, Gyu-Tae https://orcid.org/0000-0003-1966-8572
Article Title: Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
Journal Title: Nanotechnology
Article Type: paper
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Publication dates
Date Received: 2020-10-16
Date Accepted: 2020-12-10
Online publication date: 2021-01-29